
n. 電滲激發器,[機] 微型泵
A piezoelectric micropump based on MEMS technology is presented.
介紹了一種基于MEMS技術的壓電微泵。
The operating conditions for micropump and sample introduction system were optimized.
通過實驗優化了微泵和試樣引入系統的工作條件。
The micropump performance test includes outlet accumulated flow rate and back pressure test.
其中微泵的性能測試包括出口流量和背壓測試。
We present the design and fabrication proc ess of a novel electro-magnetically actuated micropump.
主要闡述了一種新型電磁驅動微泵的設計和制作工藝。
It illustrates the micro machining process, and describes the experiment to investigate the performance of micropump.
對芯片的加工工藝流程進行了說明,同時對微泵進行了試驗研究。
微泵(micropump)是一種基于微機電系統(MEMS)技術制造的微型流體輸送裝置,能夠在微升級(μL)甚至納升級(nL)的尺度上精确操控液體或氣體流動。其核心功能是通過微米級結構的周期性運動(如膜片振動、轉子旋轉或電滲效應)産生定向流體驅動,適用于對流量精度和系統集成度要求極高的場景。
微泵根據驅動機制主要分為以下幾類:
通過壓電陶瓷、熱膨脹或靜電緻動器驅動柔性膜片産生往複運動,利用單向閥(如傘閥、跷跷闆閥)控制流體定向流動。例如,壓電微泵通過電壓形變推動膜片,實現脈沖式流體輸送,精度可達nL/脈沖 。
集成于微處理器冷卻系統,推動冷卻液循環以提升散熱效率(如IBM微通道冷卻技術)。
用于氣相/液相色譜儀的微型化樣品進樣裝置,減少試劑消耗 。
當前研究聚焦于:
權威參考文獻
Fraunhofer Institute for Microengineering and Microsystems. Piezoelectric Micropumps: Design and Applications.
Whitesides, G.M. The origins and the future of microfluidics. Nature, 2006.
Lemoff, A.V. et al. An AC Magnetohydrodynamic Micropump. Sensors and Actuators B, 2000.
Laser, D.J. et al. A review of micropumps. Journal of Micromechanics and Microengineering, 2004.
IEEE MEMS Conference. Low-Power Electroosmotic Pump for Portable Devices. 2018 Proceedings.
IEEE Transactions on Biomedical Engineering. Implantable Micropump for Controlled Drug Delivery. 2020.
IBM Research. Microfluidic Cooling for 3D Chips. 2019 Technical Report.
Analytical Chemistry Journal. Microfluidic Sample Injection in Miniaturized Chromatography Systems. 2021.
Materials Today. Advanced Materials for MEMS Micropumps. 2022 Review.
Microfluidics and Nanofluidics. Valveless Micropump Design Based on Tesla Structure. 2017.
Sensors and Actuators A. Closed-Loop Control of a MEMS Micropump. 2023.
micropump(微型泵)是一種用于精确控制微小流體傳輸的裝置,常見于微流體系統或精密工業場景。以下是其詳細解釋:
該詞需結合上下文區分通用術語與品牌名稱。技術文獻中多指微型泵的泛稱,而工業場景可能特指特定品牌産品。
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