
n. 电渗激发器,[机] 微型泵
A piezoelectric micropump based on MEMS technology is presented.
介绍了一种基于MEMS技术的压电微泵。
The operating conditions for micropump and sample introduction system were optimized.
通过实验优化了微泵和试样引入系统的工作条件。
The micropump performance test includes outlet accumulated flow rate and back pressure test.
其中微泵的性能测试包括出口流量和背压测试。
We present the design and fabrication proc ess of a novel electro-magnetically actuated micropump.
主要阐述了一种新型电磁驱动微泵的设计和制作工艺。
It illustrates the micro machining process, and describes the experiment to investigate the performance of micropump.
对芯片的加工工艺流程进行了说明,同时对微泵进行了试验研究。
微泵(micropump)是一种基于微机电系统(MEMS)技术制造的微型流体输送装置,能够在微升级(μL)甚至纳升级(nL)的尺度上精确操控液体或气体流动。其核心功能是通过微米级结构的周期性运动(如膜片振动、转子旋转或电渗效应)产生定向流体驱动,适用于对流量精度和系统集成度要求极高的场景。
微泵根据驱动机制主要分为以下几类:
通过压电陶瓷、热膨胀或静电致动器驱动柔性膜片产生往复运动,利用单向阀(如伞阀、跷跷板阀)控制流体定向流动。例如,压电微泵通过电压形变推动膜片,实现脉冲式流体输送,精度可达nL/脉冲 。
集成于微处理器冷却系统,推动冷却液循环以提升散热效率(如IBM微通道冷却技术)。
用于气相/液相色谱仪的微型化样品进样装置,减少试剂消耗 。
当前研究聚焦于:
权威参考文献
Fraunhofer Institute for Microengineering and Microsystems. Piezoelectric Micropumps: Design and Applications.
Whitesides, G.M. The origins and the future of microfluidics. Nature, 2006.
Lemoff, A.V. et al. An AC Magnetohydrodynamic Micropump. Sensors and Actuators B, 2000.
Laser, D.J. et al. A review of micropumps. Journal of Micromechanics and Microengineering, 2004.
IEEE MEMS Conference. Low-Power Electroosmotic Pump for Portable Devices. 2018 Proceedings.
IEEE Transactions on Biomedical Engineering. Implantable Micropump for Controlled Drug Delivery. 2020.
IBM Research. Microfluidic Cooling for 3D Chips. 2019 Technical Report.
Analytical Chemistry Journal. Microfluidic Sample Injection in Miniaturized Chromatography Systems. 2021.
Materials Today. Advanced Materials for MEMS Micropumps. 2022 Review.
Microfluidics and Nanofluidics. Valveless Micropump Design Based on Tesla Structure. 2017.
Sensors and Actuators A. Closed-Loop Control of a MEMS Micropump. 2023.
micropump(微型泵)是一种用于精确控制微小流体传输的装置,常见于微流体系统或精密工业场景。以下是其详细解释:
该词需结合上下文区分通用术语与品牌名称。技术文献中多指微型泵的泛称,而工业场景可能特指特定品牌产品。
【别人正在浏览】